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Chemical Vapor Deposition
Results: 260

#	Item
131	Marvell NanoLab Member login Lab Manual Contents Add to Reading List Source URL: nanolab.berkeley.edu Language: English - Date: 2012-11-20 13:15:45 Microtechnology Microelectromechanical systems Wafer Chemical vapor deposition Deep reactive-ion etching Stepper Reactive-ion etching Plasma etcher Sputtering Semiconductor device fabrication Materials science Technology
132	Effect of Transition Metal Based Catalysts on Carbon Nanotube and Nanofiber Production Sinem Taş, Firuze Okyay, Yuda Yürüm Sabanci University Natural Science and Engineering Faculty, Istanbu1,34956, Turkey sinemtas@sa Add to Reading List Source URL: www.jst.go.jp Language: English - Date: 2010-04-22 23:11:57 Matter Nanomaterials Porous media Carbon nanofiber Chemical vapor deposition Mesoporous material Carbon Carbon Nanotubes Supported Catalyst Optical properties of carbon nanotubes Chemistry Materials science Carbon nanotubes
133	Thin Solid Films[removed]–40 Hot-wire chemical vapor deposition of high hydrogen content silicon nitride for solar cell passivation and anti-reflection coating applications J.K. Holta,, D.G. Goodwina, A.M. Gabor Add to Reading List Source URL: daedalus.caltech.edu Language: English* - Date: 2007-07-14 19:05:03 Materials science Thin film deposition Plasma processing Semiconductor devices Nitrides Silicon nitride Chemical vapor deposition Solar cell Plasma-enhanced chemical vapor deposition Chemistry Technology Semiconductor device fabrication
134	Plasma Page Published by the Coalition for Plasma Science, Vol.3, No.1 Add to Reading List Source URL: www.plasmacoalition.org Language: English - Date: 2002-07-16 23:23:33 Semiconductor device fabrication Plasma processing Plasma physics Thin film deposition Plasma Thin film Chemical vapor deposition Magnetosphere Beryllium Physics Chemistry Matter
135	A Phase Diagram for Morphology and Properties of Low Temperature Deposited Polycrystalline Silicon Grown by Hot-wire Chemical Vapor Deposition Christine E. Richardson, Maribeth S. Mason, and Harry A. Atwater Thomas J. Wa Add to Reading List Source URL: daedalus.caltech.edu Language: English - Date: 2006-10-31 04:02:22 Matter Epitaxy Polycrystalline silicon Chemical vapor deposition Silane Plasma-enhanced chemical vapor deposition Silicon Thin film solar cell Amorphous solid Chemistry Thin film deposition Semiconductor device fabrication
136	SYNTHESIS AND CHARACTERIZATION OF SILICON NANOROD ARRAYS FOR SOLAR CELL APPLICATIONS Brendan M. Kayes,1 Joshua M. Spurgeon,1 Thomas C. Sadler,2 Nathan S. Lewis,1 Harry A. Atwater1 1 Add to Reading List Source URL: daedalus.caltech.edu Language: English - Date: 2006-11-26 19:20:35 Semiconductor device fabrication Vapor–liquid–solid method Nanowire Chemical vapor deposition Silane Nanorod Solar cell Nanoparticle Silicon carbide Chemistry Nanomaterials Ceramic materials
137	JOURNAL OF APPLIED PHYSICS VOLUME 92, NUMBER 8 15 OCTOBER 2002 Add to Reading List Source URL: daedalus.caltech.edu Language: English - Date: 2007-07-14 19:13:41 Technology Chemical vapor deposition Coatings Plasma processing Semiconductor device fabrication Thin film deposition Wire Pressure measurement Field electron emission Vacuum Physics Measurement
138	Thin Solid Films[removed]–70 Quantitative modelling of nucleation kinetics in experiments for poly-Si growth on SiO2 by hot wire chemical vapor deposition Maribeth S. Mason, Jason K. Holt, Harry A. Atwater Thoma Add to Reading List Source URL: daedalus.caltech.edu Language: English* - Date: 2007-07-14 18:58:39 Materials science Nucleation Grain growth Epitaxy Surface diffusion Polycrystalline silicon Chemical vapor deposition Pulsed laser deposition Chemistry Semiconductor device fabrication Thin film deposition
139	728 IEEE ELECTRON DEVICE LETTERS, VOL. 31, NO. 7, JULY 2010 Characterization of Selectively Deposited Cobalt Capping Layers: Selectivity and Add to Reading List Source URL: www.appliedmaterials.com Language: English - Date: 2014-05-12 14:27:49 Chemical vapor deposition Coatings Plasma processing Vacuum Chemical engineering Low-k dielectric Chemistry Thin film deposition Semiconductor device fabrication
140	Thin Solid Films[removed]–57 Hot-wire chemical vapor deposition for epitaxial silicon growth on largegrained polycrystalline silicon templates M.S. Mason, C.M. Chen, H.A. Atwater Thomas J. Watson Laboratory of A Add to Reading List Source URL: daedalus.caltech.edu Language: English* - Date: 2007-07-14 19:05:50 Materials science Matter Epitaxy Molecular beam epitaxy Chemical vapor deposition Polycrystalline silicon Amorphous solid Silicon on sapphire Thin film deposition Semiconductor device fabrication Chemistry

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